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Gigaphoton ships new light source for
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Gigaphoton ships new light source for

Gigaphoton announced mass production and shipment of its ArF immersion “GT66A” light source, which is based on its state-of-the-art semiconductor lithography manufacturing. The new…

ASML to Acquire HMI for Sub-10nm Lithography
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ASML to Acquire HMI for Sub-10nm Lithography

Netherlands-based ASML, a leading provider of lithography systems for the semiconductor industry, agreed to acquire Taiwan-based Hermes Microvision,  a leading supplier of pattern verification…

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Lucent to provide Ultra Dense MEMS to DARPA

The Defense Advanced Research Projects Agency (DARPA) selected Lucent Technologies to develop an advanced microsystem that will make the design, engineering and fabrication of…