Gigaphoton to double production of excimer laser light sources
Gigaphoton, a manufacturer of light sources used in semiconductor lithography, announced plans to double its production capacity of excimer laser light sources by 2023.…
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Gigaphoton ships new light source for
Gigaphoton announced mass production and shipment of its ArF immersion “GT66A” light source, which is based on its state-of-the-art semiconductor lithography manufacturing. The new…